Periscope is designed to enable materials development in the semiconductor industry through three main features:

1.  Co-localization of data sets from different tools and modalities
2. Co-navigation of datasets to visualize and identify shared defect features
3. Overlap with defect data from KLARF files

Co-localization

Co-localization of disparate datasets in Periscope is achieved via shared fiducials – these could be defects that are visible in both datasets, signatures of the wafer ID, etc. Based on the shared fiducials, Periscope will calculate the required transform to overlap the two datasets. Supported datasets include x-ray topography (XRT), photoluminescence (PL), polarized linear absorption (PLA), differential interference contrast (DIC/Nomarski), surface scatter, and transient absorption (TA). Periscope also enables you to group datasets together – e.g., different channels from the same tool, to apply the same colocalization transform to all of them.

Co-navigation

Co-navigation of large datasets can be slow and cumbersome in many softwares. In Periscope, large, multi-GB datasets can be easily co-navigated at multiple frames per second, translating the smooth zooming, panning, and arrow-key navigation you are expecting to large data sets.

Defect data from KLARF files

Periscope allows you to assign meaningful labels to your raw data by overlapping it with defect data obtained from KLARF files.  You can decide which defects you want to plot while navigating your data sets, and on top of which datasets you would like to plot your defects.

Features & Support

On top of the abovementioned three key features, Periscope contains all the standard features you expect from a visualization software: Contrast adjustment, zooming, panning, arrow-key motion, blurring. There are also additional features such as marking and exporting of features of interest.

Periscope supports most common PL and XRT tools, allowing easy loading of data sets generated from those tools.